2010年

・ Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering
 S. Komiyama, Y. Sutou and J. Koike
 Materials Transaction, 51(8) (2010) 1467-1473


・ Selective Formation of a SnO2 Cap Layer, Its Growth Behavior, and Oxidation Resistance

 Yoshito Fujii, Junichi Koike, Yuji Sutou, Zifeng Li and Koji Neishi
 Japanese Journal of Applied Physics, 49 (2010) 05FA02-1-4

Effects of Water Desorption from SiO2 Substrates on the Thickness of Manganese Oxide Diffusion Barrier Layer Formed by Chemical Vapor Deposition
 Kenji Matsumoto, Koji Neishi, Hitoshi Itoh, Hidenori Miyoshi, Hiroshi Sato, Shigetoshi Hosaka and Junichi Koike
 Japanese Journal of Applied Physics, 49 (2010) 05FA12-1-2


・ Roles of deformation twinning and dislocation slip in the fatigue failure mechanism of AZ31 Mg alloys
 J. Koike, N. Fujiyama, D. Ando and Y. Sutou
 Scripta Materialia, 63 (2010) 747-750


Cu Alloy TFT Electrodes for Advanced Displays
 J. Koike, K. Hirota, P. Yun and Y. Sutou
 The proceedings of AM-FPD '10, (2010) 89-91


Electrical Properties and Microstructure of Cu-Mn Electrodes on Amorphous In-Ga-Zn-O Semiconductors
 Pilsang Yun and Junichi Koike
 The proceedings of AM-FPD '10, (2010) 45-48


・ Relationship between deformation twinning and surface step formation in AZ31 magnesium alloys
D. Ando, J. Koike and Y. Sutou
Acta Materialia, 58 (2010) 4316-4324


Crystallization behavior of Ge1Cu2Te3 amorphous film
 Y. Sutou, T. Kamada, Y. Saito, M. Sumiya and J. Koike
 2010 Materials Research Society Symposium Proceedings, 1251 (2010) H05-08


Electrical Resistance Change with Crystallization in Si-Te Amorphous Thin Films
 
Y. Saito, Y. Sutou and J. Koike
 2010 Materials Research Society Symposium Proceedings, 1251 (2010) H06-07


・ Ti-Mo-N反応性スパッタ薄膜の硬さに及ぼす熱処理の効果
 小宮山翔子、須藤祐司、小池淳一
 日本金属学会誌, 74 (2010) 135-141


The Relationship between Grain Boundary Sliding and Anisotropic Dislocation Plasticity in AZ31 Magnesium Alloys at Room Temperature
  D. Ando, Y. Sutou and J. Koike
 Magnesium Technology, (2010) 245-247


・ Graded composition and valence states in self-forming barrier layers at Cu-Mn/SiO2 interface
 Y. Otsuka, J. Koike, H. Sako, K. Ishibashi, N. Kawasaki, S. M. Chung and I. Tanaka
 Applied Physics Letters, 96 (2010) 012101-1-012101-3


2009年


The Microstructure and Mechanical Properties of Ti-Mo-N Coating Films
 S. Komiyama, Y. Sutou and J. Koike
 Proc. PFAM XVIII, 4 (2009) 2007-2016


Optimization of source-drain process with Cu-Mn alloys

 J. Koike, M. Sano, K. Hirota, Y. Sutou and K. Neishi
 Proc. Internaional Display Workshop 2009, (2009)


Selective formation of a SnO2 cap layer, its growth behavior and oxidation resistance

 Y. Fujii, J. Koike, Y. Sutou and K. Neishi
 Proc. Advanced Metallization Conference, (2009) 118-119


Effect of water desorption from dielectric substrates on the thickness of CVD-MnOx diffusion barrier layer

 K. Matsumoto, K. Neishi, H. Itoh, H. Miyoshi, H. Sato, S. Hosaka and J. Koike
 Proc. Advanced Metallization Conference, (2009) 114-115


Thin MnO barrier formation with CVD for Cu contact plug on nickel silicide

 K. Neishi, T. Sagawa, Y. Sutou and J. Koike
 Proc. Advanced Metallization Conference, (2009) 3-4


Electrical resistance and structural changes on crystallization process of amorphous Ge-Te thin films
 Y. Saito, Y. Sutou and J. Koike
 Proc. 2009 MRS Spring Meeting, (2009) 143-148

Electronic Transport Properties of Cu/MnOx/SiO2/p-Si MOS Devices
 V. K. Dixit, K. Neishi and J. Koike
 Proc. 2009 MRS Spring Meeting, (2009) 105-109

Adhesion and Cu diffusion barrier properties of a MnOx barrier layer formed with thermal MOCVD
 K. Neishi, D. Vijay, S. Aki, J. Koike, K. Matsumoto, H. Sato, H. Itoh and S. Hosaka
 Proc. 2009 MRS Spring Meeting, (2009) 99-104

CVD法による先端LSI-Cu配線用MnOxバリア層形成と信頼性評価
 根石浩司、V. K. Dixit、松本賢治、伊藤仁、佐藤浩、保坂重敏、小池淳一
 LSIにおける原子輸送・応力問題第14回研究会予稿集, (2009) 29-32

マグネシウム合金の室温変形機構 -変形双晶に注目して-
 小池淳一
 軽金属, 59 (2009) 272-277

Influence of moisture on the CVD formation of a MnOx barrier layer
 Neishi K, Matsumoto K, Sato H, Itoh H, Hosaka S, Koike J
 Proc. Advanced Metallization Conference, (2009) 307-311

Deposition Behavior and Diffusion Barrier Property of CVD MnOx
 Matsumoto K, Neishi K, Itoh H, Sato H, Hosaka S, Koike J
 Proc. of the 2009 IEEE International Interconnect Technology Conference, (2009) 197-199

Analysis of dielectric constant of a self-forming barrier layer with Cu-Mn alloy on TEOS-SiO2
 Chung SM, Koike J
 Journal of Vaccum Science & Technology B, 27 (2009) L28-L31

The Role of Deformation Twin during Fracture Behavior in AZ31
 D. Ando and J. Koike
 Magnesium, 8th International Conference on Magnesium Alloys their Applications 8, (2009) 538-543

Microstructural Investigation of Twins Under the Fracture Surface in AZ31 Magnesium Alloys
 D. Ando and J. Koike
 Proc. TMS, Magnesium Technology, (2009) 537-540

Resistivity reduction by external oxidation Cu-Mn alloy films for semiconductor interconnect application
 J. Iijima, Y. Fujii, K. Neishi and Junichi Koike
 Journal of Vacuum Science & Technology B, 27(4) (2009) 1963-1968

Chemical Vapor Deposition of Mn and Mn Oxide and their Step Coverage and Diffusion Barrier Properties on Patterned Interconnect Structures
 Kenji Matsumoto, Koji Neishi, Hitoshi Itoh, Hiroshi Sato, Shigetoshi Hosaka and Junichi Koike
 Applied Physics Express, 2 (2009) 036503

Phase formation and growth kinetics of an interface layer in Ni/SiC
 Kenichiro Terui, Atsuko Sekiguchi, Hiroshi Yoshizaki and Junichi Koike
 Materials Science Forum, 600-603 (2009) 631-634


2008年


Formation of Mn Oxide with Thermal CVD and its Diffusion Barrier Property Between Cu and SiO2
 Koji Neishi, Shiro Aki, Jun Iijima and Junichi Koike
 Proc. 2008 MRS Spring Meeting, 1079 (2008) N-03-11


Effects of Plasma Surface Treatment on the Self-forming Barrier Process in Porus SiOCH
 Seung-Min Chung, Junichi Koike and Zsolt Tokei
 Proc. 2008 MRS Spring Meeting, 1079 (2008) N-03-10


Selective Oxidation and Resistivity Reduction of Cu-Mn Alloy Films for Self-forming Barrier Process
 Jun Iijima, Yoshito Fujii, Koji Neishi and Junichi Koike
 Proc. 2008 MRS Spring Meeting, 1079 (2008) N-03-09


Possibilities and problems of self-forming barrier process for advanced LSI metallization
 Koike J, Iijima J, Neishi K
 Advanced Metallization Conference, (2008) 3-9


Finite element method analysis of nanoscratch test for the evaluation of interface adhesion strength in Cu thin films on Si substrate
 A. Sekiguchi and J. Koike
 Japanese Jounal of Applied Physics, 47(1) (2008) 249-256


Evaluation of interface adhesion strength in Cu/(Ta-x%N,Ta/TaN)/SiO2/Si by nanoscratch test
 A. Sekiguchi and J. Koike
 Japanese Journal of Applied Physics, 47(2) (2008) 1042-1049

Formation of a manganese oxide barrier layer with thermal chemical vapor deposition for advanced large-scale integrated interconnect structure
 K. Neishi, S. Aki, K. Matsumoto, H. Sato, H. Itoh, S. Hosaka and J. Koike
 Applied Physics Letters, 93 (2008) 032106


Stress relaxation during isothermal annealing in electroplated Cu films
 Soo-Jung Hwang, Young-Chang Joo and Junichi Koike
 Thin Solid Films, 516 (2008) 7588-7594

Origin of the Anomalous {1012} Twinning during Tensile Deformation of Mg Alloy Sheet
 Koike J, Sato Y, Ando D
 MATERIALS TRANSACTIONS, 49 (2008) 2792

2007年

AZ31マグネシウム合金における変形誘起表面起伏と二重双晶の関係
 安藤大輔、小池淳一
 日本金属学会誌、71(9) (2007) 684-687


Relationship between deformation-induced surface relief and double twinning AZ31 magnesium alloy
 D. Ando and J. Koike
 JOUNAL OF THE JAPAN INSTITUTE OF METALS, 71 (2007) 684

Growth behavior of self-formed barrier at Cu-Mn/SiO2 interface at 250-450 ℃
 M. Haneda, J. Iijima and J. Koike
 Applied Physics Letters, 90 (2007) 252107


Growth kinetics and thermal stability of a self-formed barrier layer at Cu-Mn/SiO2 interface
 J. Koike, M. Haneda, J. Iijima, K. Neishi et al.
 Journal of Applied Physics, 102 (2007) 043527


The effects of Cr oxidation and polyimide degradation on interface adhesion strength in Cu/Cr/polyimide flexible films
 T. Miyamura and J. Koike
 Materials Science and Engineering A, 620 (2007) 445-446


配線信頼性における界面密着性の役割
 小池淳一、貝沼亮介、関口貴子、飯島純、根石浩司
 表面科学、28(2) (2007) 67-71


2006年

Growth behavior of self-formed barrier using Cu-Mn alloys at 350 to 600 ℃
 J. Iijima, M. Haneda, J. Koike
 Proc. of the IEEE 2006 International Interconnect Technology Conference, (2006)


Cu alloy metallization for self-formed barrier process
 J. Koike, M. Haneda, J. Iijima and M. Wada
 Proc. of the IEEE 2006 International Interconnect Technology Conference, (2006)


Highly reliable copper dual-damascene interconnects with self-formed MnSixOy barrier layer
 T. Usui, H. Nasu, S. Takahashi, N. Shimizu, Y. Yoshimaru, H. Shibata and J. Koike
 IEEE Transactions on Electron Devices, 53(10) (2006) 2492-2499


2005年

Low Resistive and Highly Reliable Cu Dual-Damascene Interconnect Technology Using Self-Formed MnSixOy Barrier Layer
 T. Usui, H. Nasu, J. Koike, M. Wada, S. Takahashi, N. Shimizu, T. Nishikawa, M. Yoshimaru and H. Shibata
 Proc. of the IEEE 2005 International Interconnect Technology Conference, (2005) 188-190

Geometrical criterion for the activation of prismatic slip in AZ61 Mg alloy sheets deformed at room temperature
 J. Koike, R. Ohyama
 Acta Materialia, 53 (2005) 1963


Enhanced deformation mechanisms by anisotropic plasticity in polycrystalline Mg alloys at room temperature
 J. Koike
 Metall. Trans. A-Phys. Metall. Mater. Sci., 36A (2005) 1689


Evolution of stress-induced surface damage and stress-relaxation of electroplated Cu films at elevated temperatures
 S. J. Hwang, J. Koike and Y. C. Joo
 Materials Science Forum, 475-479 (2005) 3641-3646


Self-forming diffusion barrier layer in Cu-Mn alloy metallization
 J. Koike, M. Wada
 Applied Physics Letters, 87 (2005) 041911


2004年

Dislocation plasticity and complementary deformation mechanisms in polycrystalline Mg alloys
 J. Koike
 Designing, Processing and Properties of Advanced Engineering Materials, PTS1 and 2 Materials Science Forum, 449-4 (2004) 665


Mechanical Processes of Nanoscratch Test for the Measurement of Interface Adhesion Strength
 A. Sekiguchi and J. Koike
 Fatigue and Fracture of Engineering Materials, (2004)


東北大学 工学研究科 知能デバイス材料学専攻 小池研究室

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